The Universal Selection Source: Adhesives Ingredients

Patent

PROTECTION MEMBRANE FORMING FILM, PROTECTION MEMBRANE FORMING UTILIZATION SHEET, PRODUCTION METHOD AND INSPECTION METHOD FOR WORKPIECE OR PROCESSED PRODUCT, WORKPIECE DETERMINED AS ADEQUATE PRODUCT, AND PROCESSED PRODUCT DETERMINED AS ADEQUATE PRODUCT


Application Date:
May 11, 2017
USPTO Patent:
US 15127378
Abstract:

A protection membrane-forming film (1) containing a filler, wherein the average particle size of the filler is not more than 0.4 μm, a protection membrane-forming sheet (2), a production method and an inspection met...

Inventors:
Daisuke Yamamoto, Warabi-shi (JP)
Hiroyuki Yoneyama, Nagareyama-shi (JP)
Youichi Inao, Saitama-shi (JP)
International Classification:
C09D 163/00 (20170511); H01L 23/544 (20170511); H01L 21/66 (20170511); H01L 23/31 (20170511); H01L 21/683 (20170511); H01L 21/78 (20170511); C09J 7/02 (20170511); H01L 23/29 (20170511)

Claims

What is claimed is:

1. A protection membrane-forming film comprising a filler, wherein an average particle size of the filler is not more than 0.4 μm.

Description

TECHNICAL FIELD

The present invention relates to a protection membrane-forming film and a protection membrane-forming sheet capable of forming a protection membrane on a workpiece such as a semiconductor wafer or a processed product obtained by processing the workpiece (for example, a semiconductor chip), and also relates to a production method and...

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